Burn J. Lin Optical Lithography: Here is Why


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Burn J. Lin Optical Lithography: Here is Why НАУКА и УЧЕБА. LinГод: 2010Количество страниц: 473Формат: PDFРазмер: 29 MbЯзык: EnglishThis book is aimed at new and experienced engineers, technology managers, and senior technicians who want to enrich their understanding of the image formation physics of a lithographic system. Readers will also get a primer on the outlook of optical lithography and the many next-generation technologies that may greatly enhance semiconductor manufacturing in the near future. Readers will gain knowledge of the basic equations and constants that drive optical lithography, learn the basics of exposure systems and image formation, and come away with a full understanding of system components, processing, and optimization. Название: Optical Lithography: Here is WhyИздательство: SPIE PublicationsАвтор: Burn J.

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